Product introduction
The vacuum probe station is suitable for low-temperature electrical transport, phase change, electrical, optoelectronics, RF and microwave, wafer testing, device failure analysis and other research, and provides a test platform for non-destructive measurement and pre-package testing of various materials or devices. A series of environmentally controlled probe stations, continuous flow low-temperature vacuum probe stations for liquid helium/liquid nitrogen refrigeration forms, and closed cycle probe stations for refrigeration models have been developed to provide precise probe connections, good electrical shielding, precise temperature control, and good vacuum sealing for non-destructive measurement and pre-package testing of materials and devices. The number of probe arms can be expanded to 8, supporting a variety of DC, RF, high impedance test probes and a variety of optical fiber probes; Provide rich electrical output interface, support to connect the source meter, semiconductor analyzer, impedance analyzer and other electrical instruments for precision electrical measurement; It supports multiple control of atmosphere, humidity, illumination and magnetic field with function modules such as valve system, light source and magnet. In addition, we provide integrated solutions for high and low temperature electrical, optical, atmosphere, humidity, vacuum and magnetic field control, and support multi-field or multi-channel synchronous test software customization.
Product characteristics
Continuous flow low temperature vacuum probe station STR-400
Temperature control: 3 K~475 K (liquid helium), 78 K~475 K (liquid nitrogen), higher temperatures can be customized
Stability: ±50 mK, resolution: ±10 mK
Cooling time: 10 K about 0.5 h, 5 K about 1 h (2" sample stand, room temperature)
Vacuum chamber: vacuum degree: 10-5 Torr ~ 10-6 Torr, higher vacuum can be customized; Chamber and thermal radiation shielding material: electroless nickel aluminum plating
Optical window: Configure 1" quartz observation window to support custom matching of various spectrum or photoelectric test observation window, such as wedge window
Electrical test: Standard 4 probe arms (support expansion to 6 or 8 arms), support DC/low frequency, microwave, optical probe arms, support BNC, SMA, three coaxial electrical interfaces, support multi-type low frequency probe, microwave probe, fiber probe, etc
Closed cycle low temperature vacuum probe station GMR-300
Temperature control
Temperature range: 4.5K ~ 325K (500K optional)
Stability: ±50 mK, resolution: ±10 mK
Cooling time: 5 K ~ 5 h (2" sample station, high temperature 325 K condition)
Vacuum chamber: vacuum degree: 10-5 Torr ~ 10-6 Torr, higher vacuum can be customized; Chamber and thermal radiation shielding material: electroless nickel aluminum plating
Optical window: Configure 1" quartz observation window to support custom matching of various spectrum or photoelectric test observation window, such as wedge window
Electrical test: Standard 4 probe arms (support expansion to 6 or 8 arms), support DC/low frequency, microwave, optical probe arms, support BNC, SMA, three coaxial electrical interfaces, support multi-type low frequency probe, microwave probe, fiber probe, etc
Technical specification
Continuous flow low temperature vacuum probe station STR-400
Sample base: Support the selection of coaxial, triaxial, insulated, grounded, optical sample base, support sample base customization
Temperature controller: Support up to 51 mm(2") sample size, support for larger size customization
Temperature sensor: Equipped with silicon diode temperature sensor and Pt100 temperature sensor, respectively installed in the temperature control table, heat radiation shield and probe arm
Probe adjustment: X stroke: 25 mm; Y stroke: 25 mm; Z stroke: 10 mm; Accuracy: 10μm, 5μm, 1μm optional
System stability: Compact and compact design, can be mounted on optical platform, vibration range ±25 nm, probe position drift ±150 nm (0.5h)
Microscope: Video microscope, 3D displacement table, object distance > 10 cm, resolution 3 μm, support for higher resolution
Analysis software; Support customized special electrical analysis software, support customized analysis software and synchronous control of spectrometers, light sources, electrical instruments
Customized services: can provide low temperature, electrical, optical, spectroscopy, magnetism and other multi-field comprehensive analysis of systematic solutions
Closed cycle low temperature vacuum probe station GMR-300
Sample base: Support the selection of coaxial, triaxial, insulated, grounded, optical sample base, support sample base customization
Temperature controller: Support up to 51 mm(2") sample size, support for larger size customization
Temperature sensor: Equipped with silicon diode temperature sensor and Pt100 temperature sensor, respectively installed in the temperature control table, heat radiation shield and probe arm
Probe adjustment: X stroke: 25 mm; Y stroke: 25 mm; Z stroke: 10 mm; Accuracy: 10μm, 5μm, 1μm optional
System stability: Integrated damping platform and weight gain module, vibration range < 1μm
Microscope: Video microscope, 3D displacement table, object distance > 10 cm, resolution 3 μm, support for higher resolution
Analysis software: Support custom development of electrical analysis software, support custom analysis software and synchronous control of spectrometers, light sources, electrical instruments
Customized services: can provide low temperature, electrical, optical, spectroscopy, magnetism and other multi-field comprehensive analysis of systematic solutions
Product picture
① Continuous flow low temperature vacuum probe station STR-400
② Closed cycle low temperature vacuum probe platform GMR-300
